Marc Anderson
Laboratory Director
 |
Contact Info:1251 Wescoe Hall Drive |
Academic Degrees:
B.S. Chemistry 1996, University of Kansas
Ph.D. Chemistry 2001, University of Kansas
Areas of Specialization:
Analytical Instrumentation Design and Development
Background:
A native
Kansan, Dr. Anderson worked for over twenty years in engineering radar systems
in California and avionics in Kansas before an early midlife crisis drove
him to return to school and study chemistry. Marc received his doctorate
in Chemistry from the University of Kansas in 2001, specializing in electrochemistry
and fluid systems under the guidance of Prof. Theodore Kuwana. In 2000, Marc
joined with a small team forming a Silicon Valley start-up designing advanced
and unattended analytical instrumentation for the semiconductor industry. In
2004 he returned to the University of Kansas as a Director of laboratories
with responsibility over the Instructional Instrumentation Laboratory. So
far the enjoyment of teaching and the challenge of building expertise in
a wide variety of instrumental techniques has offset the pull of the Sierra
Nevada’s and the Pacific Ocean.
Current Interests:
Dr. Anderson continues his earlier association in problem based learning in chemistry by developing laboratory curricular materials that incorporate multiple approaches to the identification and solution of chemical problems. To that end he remains involved with the Instrumental Methods of Analysis course offered by the Chemistry Department and in chemistry curriculum development using problem based learning and chemical measurement techniques. Dr. Anderson continues to maintain his interest in developing automated and unattended analytical instrumentation, motivated by the unusual belief that inventing oneself out of a job is a worthwhile goal. Other related interests include architectural design of research laboratory facilities and environmental engineering focusing on water and wastewater treatment.
Representative Publications:
- Analysis
of Semiconductor Copper Plating Bath Chemistry using In Process Mass Spectrometry,
Marc R. Anderson, Michael West, and James Tappen, U.S. Patent Application
US2006012028A1, June 15, 2006.
- Automated
In-Process Ratio Mass Spectrometry, Howard M. Kingston, Marc R. Anderson,
Ye Han, U.S. Patent Application US20060097144A1, May 11, 2006
- Direct
Measurement of Copper Electrochemical Deposition Process Chemistry as a
Function of Bath Life, Michael J. West, Marc R. Anderson, Qin Wang, Thomas
H. Bailey, IEEE/SEMI Advanced Semiconductor Manufacturing Conference 492 – 497,
2004.
- A Method and Apparatus for In-process, Automated Analysis
and Characterization of Chemical Constituents of Process Solutions, Marc
R. Anderson, Michael West, Larry Stewart, Howard M. Kingston, U.S. Patent
Application US2003006680 April 3, 2003, WO2003076905A1 issued October 18,
2003.
- Method and Instrument for Automated Analysis of Fluid
Based Processing Systems, Marc R. Anderson, Larry Stewart, Howard M. Kingston,
U.S. Patent US20030013199A1, issued Jan 16, 2003, WO2003006946A2 issued
January 23, 2003.
- Instrumental Analysis at the University of Kansas: An Experiment in Problem-Based Learning, George S. Wilson, Marc R. Anderson, Craig E. Lunte, Anal. Chem. (1999) 71, 677A – 681A.
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